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NFPA 318- 2006 (Historical Edition) NFPA 318- Standard for the Protection of Semiconductor Fabrication Facilities 2006 Edition

NFPA 318- 2006 (Historical Edition) NFPA 318- Standard for the Protection of Semiconductor Fabrication Facilities 2006 Edition

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NFPA 318 applies to semiconductor fabrication facilities and comparable research and development areas in which hazardous chemicals are used, stored, and handled and containing a cleanroom or clean zone, or both. The 2006 edition of NFPA 318: Standard for the Protection of Semiconductor Fabrication Facilities has been revised with extracted information from NFPA 5000®: Building Construction and Safety Code® dealing with hazardous chemicals in cleanrooms. The document complies with NFPA®'s Manual of Style. (Softbound, 31 pp., 2006)

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